Computer vision based test apparatus and method for micro electro-mechanical systems

The invention discloses a kind of test device and method for micro electromechanical system based on computer vision. The device mainly includes an optical microscope, flash lightening device, MEMS structure sport motivating device, CCD camera. The character lies in: the light house uses high light luminescent diode, and secondary constant current driving circuit; MEMS sport driving uses single-chip high voltage amplifier, which has multilevel gaining adjustment. The test method is: the process includes the normalization evaluation of flash and driving signal synchronous control, flat-image amplifier geometry parameter, moving estimation of fuzziness image, moving estimation of image matching. The merits of the invention is: it uses virtual instrument to realize function adjusting and extending; realizes flat geometry parameter normalization evaluation in continuous light, aids with analysis of fuzzy moving image, realizes the quick measurement of sports character, and it has no limit to the frequency; it uses image matching technology to realize the high precise sport character test in flash light. 本发明公开了一种基于计算机视觉的微机电系统的测试装置与方法。所述的装置主要包括由光学显微镜、频闪照明装置、MEMS结构运动激励装置、CCD摄像机组成，其特征在于：光源采用高亮发光二极管，并辅以恒流驱动电路；MEMS运动驱动采用单片高压运放，具有多级增益调整。所述的测试方法，其过程包括频闪与驱动信号的同步控制、平面图像几何量参数的归一化评价、模糊图像的运动估计、图像匹配的运动估计。本发明的优点在于：采用虚拟仪器方式实现功能调整和扩展；在连续光照明下，实现平面几何量参数的归一化评定，辅以模糊运动图像的分析，实现运动特性的快速测量，且对频率无限制；在频闪照明下，利用图像匹配技术实现高精度的运动特性测试。