Micro device

谐振器4和5能够相对于基底1水平和垂直地振荡。谐振器4主要由固定地与基底1接触的支撑部件、包括与谐振器5接触的接触表面和与电极7接触的接触表面的可动部件、以及耦合支撑部件与可动部件的衔接部件构成。电极6置于谐振器5和谐振器4相间隔开的方向上。电极7置于谐振器4和谐振器5相间隔开的方向上。电极9被置于这样的位置，使谐振器5产生静电力，其方向与在谐振器4和5之间以及在谐振器5和电极6之间作用的吸引力的方向均不同。 Resonators 4 and 5 are able to oscillate horizontally and vertically to substrate 1 . Resonator 4 is primarily composed of a supporting portion in stationary contact with substrate 1 , a movable portion including a contact surface making contact with resonator 5 and a contact surface making contact with electrode 7 , and a crossing portion that couples the supporting portion and movable portion. Electrode 6 is disposed in the direction in which resonator 5 is spaced apart from resonator 4 . Electrode 7 is disposed in the direction in which resonator 4 is spaced apart from resonator 5 . Electrode 9 is disposed in a position that causes resonator 5 to generate electrostatic force in a direction different from the direction of both forces of attraction acting between resonators 4 and 5 and between resonator 5 and electrode 6.