Scanning electronic microscope standard substance and its making method

The invention relates to a standard substance to calibrate amplification of scanning electron microscope and making method. Its basal plate is coated with a measuring film, which is coated with a conductive layer and a hexagonally close-arranged monodisperse polystyrene standard particle array; its making steps: select monodisperse polystyrene standard particle water solution and basal plate; b, washing the basal plate; c, drip the water solution on to the basal palte; d, place the basal making an angle of 0-5 degrees with the horizontal plane in the purifying chamber to naturally dry. It enlarges the calibrating range of scanning electron microscope (1000-200000 times), and can give trace-to-source value in the calibrating range and additional indeterminacy of confidence intervals, making scanning electron microscope when used in the calibrating range meet the demand of ISO9000 quality assurance system. 本发明涉及计量测试标准量值传递技术领域，尤其是涉及一种用于校准扫描电子显微镜放大倍率的标准物质及其制作方法。它的基板上镀有测量膜，测量膜上镀有导电层，测量膜为六角紧密排列的单分散相聚苯乙烯标准粒子列阵，a.选取单分散相聚苯乙烯标准粒子水溶液、选取基板；b.清洗基板；c.将单分散相聚苯乙烯标准粒子水溶液滴洒在基板上；d.将基板与水平面呈0°～5°放入净化室中自然干燥。本发明扩大了扫描电子显微镜的校准范围(1000倍～200000倍)，并能在其校准范围内给出溯源值并附有给定置信区间的不确定度，使得扫描电子显微镜在被校准范围内使用中符合ISO9000质量保证体系的要求。