Magneto-resistance effect element, magnetic head and magnetic storage device

本发明提供一种磁阻效应元件、磁头和磁存储装置，其中，所述磁阻效应元件；其特征在于，具备强磁性膜和以一般式：R#-[X]Mn#-[100-X]，式中，R是选自Ir、Rh、Pt、Au、Ag、Co、Pd、Ni、Cr、Ge、Ru、Re和Cu中的至少一种，X满足2≤X≤80，或者一般式：(R#-[X']Mn#-[1-X'])#-[100-Y]Fe#-[Y]，式中，R是选自Ir、Rh、Pt、Au、Ag、Co、Pd、Ni、Cr、Ge、Ru、Re和Cu中的至少一种，X'满足0.02≤X'≤0.80，Y满足0＜Y＜30所表示的反强磁性膜，上述反强磁性膜具有进行面内取向，而...

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Bibliographische Detailangaben
1. Verfasser:	FUKE HIROMI,IWASAKI HITOSHI,SAHASHI MASASHI,SAITO KAZUHIRO,NAKAMURA SHIN-ICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDUCTANCES INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAGNETS METALLURGY PHYSICS SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES SEMICONDUCTOR DEVICES STATIC STORES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSFORMERS
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Beschreibung
Zusammenfassung:	本发明提供一种磁阻效应元件、磁头和磁存储装置，其中，所述磁阻效应元件；其特征在于，具备强磁性膜和以一般式：R#-[X]Mn#-[100-X]，式中，R是选自Ir、Rh、Pt、Au、Ag、Co、Pd、Ni、Cr、Ge、Ru、Re和Cu中的至少一种，X满足2≤X≤80，或者一般式：(R#-[X']Mn#-[1-X'])#-[100-Y]Fe#-[Y]，式中，R是选自Ir、Rh、Pt、Au、Ag、Co、Pd、Ni、Cr、Ge、Ru、Re和Cu中的至少一种，X'满足0.02≤X'≤0.80，Y满足0＜Y＜30所表示的反强磁性膜，上述反强磁性膜具有进行面内取向，而且与上述强磁性膜进行交换结合而构成的交换结合膜；和用以将电流对上述交换结合膜通电的电极。 An exchange-coupling film has an antiferromagnetic film consisting of an antiferromagnetic alloy such as an RMn alloy or an RMnFe alloy (R is at least one kind of element selected from Ir, Rh, Pt, Au, Ag, Co, Pd, Ni, Cr, Ge, Ru and Cu) and a ferromagnetic film stacked with the antiferromagnetic film. The antiferromagnetic film is oriented in its plane. Further, the antiferromagnetic film has a large grain diameter of such as 5 nm or more. The antiferromagnetic film can be obtained by forming a film with an alloy target of which oxygen content is 1% by weight or less. An exchange-coupling film using such an antiferromagnetic film has exchange-coupling force enough large at room temperature and high temperature region together with excellent corrosion resistance or heat resistance. The exchange-coupling film is provided with an electrode for energizing an electric current to the ferromagnetic film and is used as, for example, a spin valve type magneto-resistance effect element.