Method for eliminating photoelectric crosstalk for guadrantal photoelectric detector

Isolating diode is designed and prepared under polarity and technological conditions identical to photosensitive element between quadrant photosensitive elements in semiconductor quadrant photo detector. The isolating diode possesses an independent electrode and a common electrode, which is shared by a photosensitive element. Shape of tube core of diode can be in annular, cross-shaped, comby, net shaped, and their combination. In application, the diode through bias circuit constitutes a short circuit connection. Thus, cross talk photocurrent and photocurrent caused by light irradiation are shorted out so as not to enter into adjacent photosensitive element, thereby photoelectric crosstalk is eliminated. Comparing with prior art, photoelectric crosstalk between photosensitive elements is eliminated totally in the invented detector. The invention raises detecting sensitivity and reliability as well as tracking and measuring precision. 本发明公开了一种消除半导体象限光电探测器光电串扰的方法，用于无串扰象限光电探测器的制作，其特征在于：在半导体象限光电探测器象限光敏元之间设计、制作一独立的与光敏元同结构、同极性、同工艺条件、同时制作的隔离二极管，该隔离二极管与象元探测器有一公共电极，另有一独立电极。二极管的管芯形状可以是环形形状，也可以是十字形状，还可以是梳状形状，网状形状以及它们的各种组合形状。应用时，该二极管经接偏置电路后构成短路连接，使产生的串扰光电流及该二极管因直接受光照射产生的光电流一同短路，而不进邻近的光敏元，从而消除光电串扰。应用该方法制作的象限光电探测器与现有象限光电探测器相比，其象限光敏元之间的光电串扰完全被消除，探测灵敏度、制导、跟踪测距等的精度以及可靠性等性能大为提高。