Anisotropic conductive connector, its mfg. method and probe member

提供一种各向异性导电性连接器、其制造方法以及探针构件，通过这种各向异性导电性连接器，即使晶片的面积较大，并且即使以较小的间距排列被检查电路，也可以很容易地在被检查晶片上定位、固定和安装该各向异性导电性连接器，并且，在该各向异性导电性连接器中，对于所有连接用导电部分可以保证实现良好的导电性，并且可以保证在相邻的导电部分之间实现绝缘性。该各向异性导电性连接器包含框板和多个弹性各向异性导电膜，该框板具有与晶片的被检查电极的区域对应而形成的多个各向异性导电膜配置用孔，该弹性各向异性导电膜配置于各个各向异性导电膜配置用孔中并由其周缘部分支撑。每个弹性各向异性导电膜包含功能部分和被支撑部分，该功能部分包含多个导电部分和绝缘部分，该导电部分与被检查电极相对应而配置，它包含高密度的表现出磁性的粒子并沿膜的厚度方向延伸，该绝缘部分使这些导电部分相互绝缘，该被支撑部分整体形成于功能部分的周缘部分上并固定于该框板中的用于配置各向异性导电膜的内周缘上，并且该被支撑部分包含表现为磁性的导电性粒子。 Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer to be inspected can be conducted with ease even when the wafer has a large area, and the pitch of electrodes to be inspected is small, and moreover good conductivity can be achieved as to all conductive parts, and insulating property between adjacent conductive parts can be achieved, a production process thereof, and a probe member. The anisotropically conductive connector comprises a frame plate having a plurality of anisotropically conductive film-arranging holes formed corresponding to regions of electrodes to be inspected of a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes and supported by the inner peripheral edge thereabout. Each of the elastic anisotropically conductive films is composed of a functional part composed of a plurality of conductive parts arranged corresponding to the electrodes to be inspected, containing conductive particles exhibiting magnetism at a high density and extending in the thickness-wise direction of the film and insulating parts mutually insulating these conductive parts, and a supported part integrally formed at a peripheral edge of the functional part and fixed to the inner periphery about the anisotropically conductive film-arranging hole. The supported part contains the conductive particles exhibiting magnetism.