Polishing pad with built-in optical sensor

一种包含光源(35)和探测器(36)的光学传感器(25)被安置在抛光垫(3)的空腔(2)中，从而面对着被抛光表面(4)。来自光源(35)的光线从被抛光表面(4)上反射，而探测器(36)探测反射的光线。探测器(36)产生的电信号被传送到安置在抛光垫(3)的中心孔(23)中的电子器件集成件(10)中。一次性抛光垫(3)以可拆卸的方式机械和电气连接着集成件(10)。集成件(10)中容纳着电路，该电路用于向光学传感器(25)供应电能和向非旋转控制台(9)传送电信号。系统能够连续地监视被抛光表面的光学特性，即使是在抛光机(1)运转时，而且能够确定抛光过程的终点。 An optical sensor that includes a light source and a detector is located within a cavity in a polishing pad so as to face the surface that is being polished. Light from the light source is reflected from the surface being polished and the detector detects the reflected light. The electrical signal produced by the detector is conducted to a hub located at the central aperture of the polishing pad. The disposable polishing pad is removably connected, both mechanically and electrically to the hub. The hub contains electronic circuitry that is concerned with supplying power to the optical sensor and with transmitting the electrical signal to a non-rotating station. Several techniques are described for accomplishing these tasks. The system permits continuous monitoring of an optical characteristic of a surface that is being polished, even while the polishing machine is in operation, and permits the end point of the polishing process to be determined.