Improved calibration of vector network analyzer

An improved calibration method for a vector network analyzer stores sparse calibration data, interpolates system error data from the sparse calibration data for each measurement by the vector network analyzer, and creates calibrated measurement data from the system error data and uncorrected measurement data at each measurement frequency. The sparse calibration data may be generated by measuring every Nth frequency step over a calibration frequency range greater than a specified measurement frequency range, or by measuring every frequency step over the calibration frequency range and compressing the resulting measurement data. The interpolation may be achieved by using a curve-fit algorithm, such as a parametric polynomial curve fitting algorithm.