Method for making anti-electrostatic light cover

Method for making anti-electrostatic light cover

In the procedure of manufacturing reticles, the Marangoni dryer technique with antistatic material being added to isopropyl alcohol (IPA) is adopted to carry out the dry treatment so as to form an antistatic layer as the protection layer on the surface of reticle in the period of dry treatment. Thus...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WEIYU SU, LIGONG TENG, DONGXU ZHENG
Format: Patent
Sprache:eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:In the procedure of manufacturing reticles, the Marangoni dryer technique with antistatic material being added to isopropyl alcohol (IPA) is adopted to carry out the dry treatment so as to form an antistatic layer as the protection layer on the surface of reticle in the period of dry treatment. Thus, damaging the mask on reticles caused by electric static discharge (ESD) can be avoided.