Method and apparatus for cutting nonmetallic substrate by laser beam

Disclosed are an apparatus and a method for cutting a non-metal substrate. A laser device generates a first laser beam onto a cutting route formed in the non-metal substrate for heating the cutting route such that a scribe line is formed on the cutting route. The laser device also generates a second...

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Bibliographische Detailangaben
Hauptverfasser: CHU TE-HO, NAM HYONG-UU, CHUN BEK-KYOON
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed are an apparatus and a method for cutting a non-metal substrate. A laser device generates a first laser beam onto a cutting route formed in the non-metal substrate for heating the cutting route such that a scribe line is formed on the cutting route. The laser device also generates a second laser beam, which is spaced by a predetermined distance from the first laser beam, such that a beam pattern is formed along a radiating route of the first laser beam. A cooling device forms a crack by applying a cooling fluid beam onto the cutting route formed between the first laser beam and the second laser beam. After applying the cooling fluid beam, the non-metal substrate is cut by using one beam pattern, to simplify an optical system. A great tensile force is generated in the scribe line, so the thick non-metal substrate can be completely cut at once.