High density area array solder microjoining interconnect structure and fabrication method

A system for interconnecting a set of device chips by means of an array of microjoints disposed on an interconnect carrier is taught. The carrier is provided with a dense array of microjoint receptacles with an adhesion layer, barrier layer and a noble metal layer; the device wafers are fabricated w...

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Bibliographische Detailangaben
1. Verfasser: MAGERLEIN JOHN HAROLD,PETRARCA KEVIN SHAWN,PURUSHOTHAMAN SAMPATH,SAMBUCETTI CARLOS JUAN,VOLANT RICHARD PAUL,WALKER GEORGE FREDERICK
Format: Patent
Sprache:eng
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Zusammenfassung:A system for interconnecting a set of device chips by means of an array of microjoints disposed on an interconnect carrier is taught. The carrier is provided with a dense array of microjoint receptacles with an adhesion layer, barrier layer and a noble metal layer; the device wafers are fabricated with an array of microjoining pads including an adhesion layer, barrier layer and a fusible solder layer with pads being located at matching locations in reference to the barrier receptacles; the device chips are joined to the carrier through the microjoint arrays resulting in interconnections capable of very high input/output density and inter-chip wiring density.