Semiconductor acceleration sensor and method of manufacturing the same

Semiconductor acceleration sensor and method of manufacturing the same

The sensor has a rectangular frame (2) with damper plate portions (6) that covers a part of an opening (21) and serves as a stopper to limit movement of a weight. The weight has corner portions (53) that face respective corner portions (22) of the frame, and is chamfered to have a shape of arc or a...

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1. Verfasser: KATAOKA KAZUSHI,YOSHIDA HITOSHI,AKAI SUMIO,MORII MAKOTO,MIYAJIMA HISAKAZU,WAKABAYASHI DAISUKE,GOTO KOJI
Format: Patent
Sprache:eng
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INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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creator KATAOKA KAZUSHI,YOSHIDA HITOSHI,AKAI SUMIO,MORII MAKOTO,MIYAJIMA HISAKAZU,WAKABAYASHI DAISUKE,GOTO KOJI
description The sensor has a rectangular frame (2) with damper plate portions (6) that covers a part of an opening (21) and serves as a stopper to limit movement of a weight. The weight has corner portions (53) that face respective corner portions (22) of the frame, and is chamfered to have a shape of arc or a polygonal line. The part spans from the corner portion of two neighboring sides of the frame to inside of the opening. An independent claim is also included for a method of manufacturing a semiconductor acceleration sensor.
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subjects INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
title Semiconductor acceleration sensor and method of manufacturing the same
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