Semiconductor acceleration sensor and method of manufacturing the same

The sensor has a rectangular frame (2) with damper plate portions (6) that covers a part of an opening (21) and serves as a stopper to limit movement of a weight. The weight has corner portions (53) that face respective corner portions (22) of the frame, and is chamfered to have a shape of arc or a...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	KATAOKA KAZUSHI,YOSHIDA HITOSHI,AKAI SUMIO,MORII MAKOTO,MIYAJIMA HISAKAZU,WAKABAYASHI DAISUKE,GOTO KOJI
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The sensor has a rectangular frame (2) with damper plate portions (6) that covers a part of an opening (21) and serves as a stopper to limit movement of a weight. The weight has corner portions (53) that face respective corner portions (22) of the frame, and is chamfered to have a shape of arc or a polygonal line. The part spans from the corner portion of two neighboring sides of the frame to inside of the opening. An independent claim is also included for a method of manufacturing a semiconductor acceleration sensor.