Micro-electromechanical system testing device and method based on micro-interference technique

The invention discloses a kind of testing device and method for micro electromechanical system based on microinterference technology. The device mainly includes a light microscope, a Mirau interferometer, a phase shift controller, stroboscopic illumination driving device, a LED array, a MEMS structure moving motivation device. The character lies in: the light source uses diode array, and each sub light source has an independent collimating device; the microinterference device integrates the light splitting channel Mirau interference microscope and the phase shift controller. The measuring method includes the synchronous control of the strobotron and driving signal, the separation of the mutation area in the interference figure, the reconstruction of the three-dimension surface and inclination amendment, the normalization analysis of the three-dimension surface, the tracing of the measured point. The merits of the invention lie in: the invention uses virtual device mode to facilitate the adjustment and development of the system function; uses light splitting channel Mirau interference microscope and the phase shift device to realize the test of three-dimension movement characters with high recession and anti-interference ability in mode of the continuous light and strobotron illumination.