Stamp, method, and apparatus

The stamp (10) for use in a lithographic process, such as patterning a surface layer, of the invention has a stamp body (1) with a first (11) and a second side (12), at which first side (11) a printing face (2) is present and at which second side (12) a stack of a carrier body (4) and a reservoir (3...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: BLEES MARTIN H.,SLIKKERVEER PETER J.,GELDERLAND SIGRID M. R
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The stamp (10) for use in a lithographic process, such as patterning a surface layer, of the invention has a stamp body (1) with a first (11) and a second side (12), at which first side (11) a printing face (2) is present and at which second side (12) a stack of a carrier body (4) and a reservoir (3) for liquid are present. The carrier body contains channels (5) in order that the liquid can be transported from the reservoir (3) to the stamp body (1) and further to the printing face (2). The stamp may be embodied as a cylinder, allowing a continuous lithographic printing process. This process results in patterns on a micron or submicron scale. The stamp (10) may furthermore be included in a larger apparatus.