Elastic surface wave element suitable for gigahertz frequency band
IDT electrodes (13) are formed by a Cu alloy. When the wavelength of a SAW propagating in the direction of the X axis of a piezoelectric substrate (12) is indicated by », and when the thickness of the IDT electrodes is indicated by H, the standardized thickness H/» of the IDT electrodes ranges from...
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Zusammenfassung: | IDT electrodes (13) are formed by a Cu alloy. When the wavelength of a SAW propagating in the direction of the X axis of a piezoelectric substrate (12) is indicated by », and when the thickness of the IDT electrodes is indicated by H, the standardized thickness H/» of the IDT electrodes ranges from 0.045 to 0.070, and the piezoelectric substrate is a rotated Y-cut LiTaO 3 substrate whose rotational cut angle ¸ from the Y axis to the Z axis around the X axis ranges from 52.0° to 58.0°. With this arrangement, the reflection coefficient S11 becomes 0.88 or higher. |
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