Magnetic head actuator and its manufacturing method
A magnetic head actuator includes a head-holding substrate having a pair of movable arms for clamping a magnetic head, and piezoelectric elements fixed along the pair of movable arms to move the pair of movable arms in response to an applied voltage. The head-holding substrate comprises a fired glas...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A magnetic head actuator includes a head-holding substrate having a pair of movable arms for clamping a magnetic head, and piezoelectric elements fixed along the pair of movable arms to move the pair of movable arms in response to an applied voltage. The head-holding substrate comprises a fired glass-ceramic compact containing at least one of SiO2, B2O3, and Al2O3. The piezoelectric elements are formed on the head-holding substrate with a piezoelectric material by printing and low-temperature firing. |
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