Piezoelectric actuator, liquid spray nozzle containing it and manufacturing method thereof
A first common electrode (37) to be fixed at a predetermined potential is formed on a vibration plate. The first common electrode has a first proximal portion and first branch portions extended from the proximal portion. A first piezoelectric layer (35) is laminated on each of the first branch porti...
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Zusammenfassung: | A first common electrode (37) to be fixed at a predetermined potential is formed on a vibration plate. The first common electrode has a first proximal portion and first branch portions extended from the proximal portion. A first piezoelectric layer (35) is laminated on each of the first branch portions. A drive electrode (33) is laminated on each first piezoelectric layer. A second piezoelectric layer (34) is laminated on each drive electrode. A second common electrode (36) to be fixed at the predetermined potential has a second proximal portion and second branch portions extended from the proximal portion such that each of the second branch portions is laminated on each second piezoelectric layer. A conduction member (47) electrically connects the first proximal portion and the second proximal portion. A first common electrode (37) to be fixed at a predetermined potential is formed on a vibration plate. The first common electrode has a first proximal portion and first branch portions extended from the proximal portion. A first piezoelectric layer (35) is laminated on each of the first branch portions. A drive electrode (33) is laminated on each first piezoelectric layer. A second piezoelectric layer (34) is laminated on each drive electrode. A second common electrode (36) to be fixed at the predetermined potential has a second proximal portion and second branch portions extended from the proximal portion such that each of the second branch portions is laminated on each second piezoelectric layer. A conduction member (47) electrically connects the first proximal portion and the second proximal portion. |
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