Method for making dual-inlaid contact window

A method for making double inlaid-metal internal connecting line and contact window opening structure on a base is as follows: form first oxide layer and first nitride layer on the base in turn; forma contact window opening by patterning and etching first nitride layer; form second oxide layer and p...

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Bibliographische Detailangaben

Hauptverfasser:	YOULUN DU, JIJIN LUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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