Soft passivation layer in semiconductor fabrication

The use of an etch stop layer to define a terminal via opening to access a device feature after formation of a photosensitive soft-passivation layer. The etch layer allows the size of the terminal via opening to be decoupled from the resolution capabilities of current photosensitive soft-passivation...

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Hauptverfasser: CHANDRASEKHAR NARAYAN, BETTINA DINKEL
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creator CHANDRASEKHAR NARAYAN
BETTINA DINKEL
description The use of an etch stop layer to define a terminal via opening to access a device feature after formation of a photosensitive soft-passivation layer. The etch layer allows the size of the terminal via opening to be decoupled from the resolution capabilities of current photosensitive soft-passivation layer.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Soft passivation layer in semiconductor fabrication
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