Method for preparing lithium ion solid electrolyte film with high deposition rate

Azotized Li3PON4 or simplified as lithium phosphor, oxygen and nitrogen (LiPON) is prepared by combination of the pluse laser deposition method and the azote ion source generator. The method providesfast deposition speed reaching to 0.8-2.0 micron m per hour. The conductivity of Li ion of the lithiu...

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Bibliographische Detailangaben
Hauptverfasser:	SHENGLI ZHAO, ZHENGWEN FU, QIZONG QIN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Azotized Li3PON4 or simplified as lithium phosphor, oxygen and nitrogen (LiPON) is prepared by combination of the pluse laser deposition method and the azote ion source generator. The method providesfast deposition speed reaching to 0.8-2.0 micron m per hour. The conductivity of Li ion of the lithium, phosphor, oxygen and nitrogen film prepared by using the invented method reaches 2-5X10 to the power -6 s/cm. Combining with V2O5 and MoO3 etc. other electrodes as well as the metal lithium film electrode prepared by heat evaporation, the all-solid state film lithium ion battery can be assembled.