Height-adjustable magnetic suspension limiting column and semiconductor equipment

Height-adjustable magnetic suspension limiting column and semiconductor equipment

The invention provides a height-adjustable magnetic suspension limiting column and a semiconductor device wherein the height-adjustable magnetic suspension limiting column is arranged between a cavity of the semiconductor device and a magnetic suspension stator and used for adjusting the distance be...

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Hauptverfasser: CHEN HAITAO, QI GUANGJIE, ZHANG JIAN
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator CHEN HAITAO
QI GUANGJIE
ZHANG JIAN
description The invention provides a height-adjustable magnetic suspension limiting column and a semiconductor device wherein the height-adjustable magnetic suspension limiting column is arranged between a cavity of the semiconductor device and a magnetic suspension stator and used for adjusting the distance between the cavity and the magnetic suspension stator, and the height-adjustable magnetic suspension limiting column comprises a first column body and a second column body, the first column body and the second column body are in threaded connection, the upper surface of the first column body abuts against the cavity, and the lower surface of the second column body abuts against the magnetic suspension stator. The height of the magnetic suspension limiting column is controlled by screwing the first column body or the second column body to extend or shorten the magnetic suspension limiting column, so that the distance between the magnetic suspension stator and the cavity is adjusted, the height of the magnetic suspensi
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Height-adjustable magnetic suspension limiting column and semiconductor equipment
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