Height-adjustable magnetic suspension limiting column and semiconductor equipment

The invention provides a height-adjustable magnetic suspension limiting column and a semiconductor device wherein the height-adjustable magnetic suspension limiting column is arranged between a cavity of the semiconductor device and a magnetic suspension stator and used for adjusting the distance be...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHEN HAITAO, QI GUANGJIE, ZHANG JIAN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a height-adjustable magnetic suspension limiting column and a semiconductor device wherein the height-adjustable magnetic suspension limiting column is arranged between a cavity of the semiconductor device and a magnetic suspension stator and used for adjusting the distance between the cavity and the magnetic suspension stator, and the height-adjustable magnetic suspension limiting column comprises a first column body and a second column body, the first column body and the second column body are in threaded connection, the upper surface of the first column body abuts against the cavity, and the lower surface of the second column body abuts against the magnetic suspension stator. The height of the magnetic suspension limiting column is controlled by screwing the first column body or the second column body to extend or shorten the magnetic suspension limiting column, so that the distance between the magnetic suspension stator and the cavity is adjusted, the height of the magnetic suspensi