MEMS sensor anti-corrosion process

The invention relates to an MEMS sensor anticorrosion technology, and belongs to the technical field of MEMS sensors, and the MEMS sensor anticorrosion technology comprises the following steps: S1, fixedly pasting a conditioning circuit on a substrate through conditioning circuit bonding glue; step S2, an MEMS sensor is fixedly pasted on the conditioning circuit through an MEMS adhesive; s3, bonding an electric connection wire; according to the method, the CVD coating technology is adopted, so that the method has imperforate permeability and excellent coating characteristics, the coating is compact and free of pinholes, tiny gaps, defects and the like in a multi-layer stacked sealing structure can be effectively filled, uniform coating can be achieved, and effective protection is achieved; the fluorine-containing CVD coating is adopted and is compatible with a microelectronic integrated circuit process, so that a thin film coating with the thickness of dozens of nanometers to dozens of microns required in dif