Dicing device, method for manufacturing semiconductor chip, and semiconductor chip
The dicing device (1) is provided with: a laser irradiation unit (13a) that forms a modified layer (Wm) in a wafer (W1) by irradiating a laser light (L) in a Df direction extending along each of a plurality of dicing lanes (Ws) of the wafer (W1); a first imaging unit (14a) capable of imaging the waf...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The dicing device (1) is provided with: a laser irradiation unit (13a) that forms a modified layer (Wm) in a wafer (W1) by irradiating a laser light (L) in a Df direction extending along each of a plurality of dicing lanes (Ws) of the wafer (W1); a first imaging unit (14a) capable of imaging the wafer (W1) on which the modified layer (Wm) has been formed; and a common attachment member (13b) to which both the laser irradiation unit (13a) and the first imaging unit (14a) are attached.
该切割装置(1)具备:激光照射部(13a),通过在沿着晶片(W1)的多个切割道(Ws)的各自延伸的Df方向上照射激光(L)而在晶片(W1)内形成改质层(Wm);第一拍摄部(14a),能够拍摄形成改质层(Wm)后的晶片(W1);及共用的安装构件(13b),安装有激光照射部(13a)及第一拍摄部(14a)的双方。 |
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