Mixing ratio detection method for CF3SO2F mixed gas

The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each...

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Bibliographische Detailangaben
Hauptverfasser:	ZHU SHAN, LIU WEI, DONG WANGCHAO, HAO DONGXIN, REN SHUBO, ZHENG YU, XIAO YAPENG, ZHOU WENJUN, MA FENGXIANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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