Mixing ratio detection method for CF3SO2F mixed gas

The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each component of the target mixed gas, the corresponding filling volume of the gas is set; closing a gas valve according to the gas pressure indication in the cavity, and extracting a sample by adopting a gas taking bottle; and testing the chromatographic peak area of CF3SO2F in the mixed gas by adopting a GC instrument, and drawing a standard curve of the peak area and the proportion. According to the invention, the proportion detection of CF3SO2F in the mixed gas can be realized. 本发明公开了一种CF3SO2F混合气体的混合比检测方法，包括：检测整个配气系统的气路气密性，并对所述气路系统进行洗气处理；根据目标混合气体各组分所占比例，设置气体相应的灌充体积；根据腔体内气压表示数关闭气体阀门，采用取气瓶抽取样品；采用GC仪器测试CF3SO2F在混合气体的色谱峰面积，绘制峰面积与比例的标准曲线。本发明能够实现CF3SO2F在混合气体的比例检测。