Mixing ratio detection method for CF3SO2F mixed gas
The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each...
Gespeichert in:
| Hauptverfasser: | , , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | ZHU SHAN LIU WEI DONG WANGCHAO HAO DONGXIN REN SHUBO ZHENG YU XIAO YAPENG ZHOU WENJUN MA FENGXIANG |
| description | The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each component of the target mixed gas, the corresponding filling volume of the gas is set; closing a gas valve according to the gas pressure indication in the cavity, and extracting a sample by adopting a gas taking bottle; and testing the chromatographic peak area of CF3SO2F in the mixed gas by adopting a GC instrument, and drawing a standard curve of the peak area and the proportion. According to the invention, the proportion detection of CF3SO2F in the mixed gas can be realized.
本发明公开了一种CF3SO2F混合气体的混合比检测方法，包括：检测整个配气系统的气路气密性，并对所述气路系统进行洗气处理；根据目标混合气体各组分所占比例，设置气体相应的灌充体积；根据腔体内气压表示数关闭气体阀门，采用取气瓶抽取样品；采用GC仪器测试CF3SO2F在混合气体的色谱峰面积，绘制峰面积与比例的标准曲线。本发明能够实现CF3SO2F在混合气体的比例检测。 |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN118883805A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN118883805A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN118883805A3</originalsourceid><addsrcrecordid>eNrjZDD2zazIzEtXKEosycxXSEktSU0GMvIUclNLMvJTFNLyixSc3YyD_Y3cFHIzK1JTFNITi3kYWNMSc4pTeaE0N4Oim2uIs4duakF-fGpxQWJyal5qSbyzn6GhhYWFsYWBqaMxMWoAhnUrSA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Mixing ratio detection method for CF3SO2F mixed gas</title><source>esp@cenet</source><creator>ZHU SHAN ; LIU WEI ; DONG WANGCHAO ; HAO DONGXIN ; REN SHUBO ; ZHENG YU ; XIAO YAPENG ; ZHOU WENJUN ; MA FENGXIANG</creator><creatorcontrib>ZHU SHAN ; LIU WEI ; DONG WANGCHAO ; HAO DONGXIN ; REN SHUBO ; ZHENG YU ; XIAO YAPENG ; ZHOU WENJUN ; MA FENGXIANG</creatorcontrib><description>The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each component of the target mixed gas, the corresponding filling volume of the gas is set; closing a gas valve according to the gas pressure indication in the cavity, and extracting a sample by adopting a gas taking bottle; and testing the chromatographic peak area of CF3SO2F in the mixed gas by adopting a GC instrument, and drawing a standard curve of the peak area and the proportion. According to the invention, the proportion detection of CF3SO2F in the mixed gas can be realized.
本发明公开了一种CF3SO2F混合气体的混合比检测方法，包括：检测整个配气系统的气路气密性，并对所述气路系统进行洗气处理；根据目标混合气体各组分所占比例，设置气体相应的灌充体积；根据腔体内气压表示数关闭气体阀门，采用取气瓶抽取样品；采用GC仪器测试CF3SO2F在混合气体的色谱峰面积，绘制峰面积与比例的标准曲线。本发明能够实现CF3SO2F在混合气体的比例检测。</description><language>chi ; eng</language><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; PHYSICS ; TESTING</subject><creationdate>2024</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20241101&DB=EPODOC&CC=CN&NR=118883805A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20241101&DB=EPODOC&CC=CN&NR=118883805A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>ZHU SHAN</creatorcontrib><creatorcontrib>LIU WEI</creatorcontrib><creatorcontrib>DONG WANGCHAO</creatorcontrib><creatorcontrib>HAO DONGXIN</creatorcontrib><creatorcontrib>REN SHUBO</creatorcontrib><creatorcontrib>ZHENG YU</creatorcontrib><creatorcontrib>XIAO YAPENG</creatorcontrib><creatorcontrib>ZHOU WENJUN</creatorcontrib><creatorcontrib>MA FENGXIANG</creatorcontrib><title>Mixing ratio detection method for CF3SO2F mixed gas</title><description>The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each component of the target mixed gas, the corresponding filling volume of the gas is set; closing a gas valve according to the gas pressure indication in the cavity, and extracting a sample by adopting a gas taking bottle; and testing the chromatographic peak area of CF3SO2F in the mixed gas by adopting a GC instrument, and drawing a standard curve of the peak area and the proportion. According to the invention, the proportion detection of CF3SO2F in the mixed gas can be realized.
本发明公开了一种CF3SO2F混合气体的混合比检测方法，包括：检测整个配气系统的气路气密性，并对所述气路系统进行洗气处理；根据目标混合气体各组分所占比例，设置气体相应的灌充体积；根据腔体内气压表示数关闭气体阀门，采用取气瓶抽取样品；采用GC仪器测试CF3SO2F在混合气体的色谱峰面积，绘制峰面积与比例的标准曲线。本发明能够实现CF3SO2F在混合气体的比例检测。</description><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2024</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDD2zazIzEtXKEosycxXSEktSU0GMvIUclNLMvJTFNLyixSc3YyD_Y3cFHIzK1JTFNITi3kYWNMSc4pTeaE0N4Oim2uIs4duakF-fGpxQWJyal5qSbyzn6GhhYWFsYWBqaMxMWoAhnUrSA</recordid><startdate>20241101</startdate><enddate>20241101</enddate><creator>ZHU SHAN</creator><creator>LIU WEI</creator><creator>DONG WANGCHAO</creator><creator>HAO DONGXIN</creator><creator>REN SHUBO</creator><creator>ZHENG YU</creator><creator>XIAO YAPENG</creator><creator>ZHOU WENJUN</creator><creator>MA FENGXIANG</creator><scope>EVB</scope></search><sort><creationdate>20241101</creationdate><title>Mixing ratio detection method for CF3SO2F mixed gas</title><author>ZHU SHAN ; LIU WEI ; DONG WANGCHAO ; HAO DONGXIN ; REN SHUBO ; ZHENG YU ; XIAO YAPENG ; ZHOU WENJUN ; MA FENGXIANG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN118883805A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2024</creationdate><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>ZHU SHAN</creatorcontrib><creatorcontrib>LIU WEI</creatorcontrib><creatorcontrib>DONG WANGCHAO</creatorcontrib><creatorcontrib>HAO DONGXIN</creatorcontrib><creatorcontrib>REN SHUBO</creatorcontrib><creatorcontrib>ZHENG YU</creatorcontrib><creatorcontrib>XIAO YAPENG</creatorcontrib><creatorcontrib>ZHOU WENJUN</creatorcontrib><creatorcontrib>MA FENGXIANG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>ZHU SHAN</au><au>LIU WEI</au><au>DONG WANGCHAO</au><au>HAO DONGXIN</au><au>REN SHUBO</au><au>ZHENG YU</au><au>XIAO YAPENG</au><au>ZHOU WENJUN</au><au>MA FENGXIANG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Mixing ratio detection method for CF3SO2F mixed gas</title><date>2024-11-01</date><risdate>2024</risdate><abstract>The invention discloses a method for detecting the mixing ratio of CF3SO2F mixed gas, which comprises the following steps: detecting the gas tightness of a gas path of a whole gas distribution system, and carrying out gas washing treatment on the gas path system; according to the proportion of each component of the target mixed gas, the corresponding filling volume of the gas is set; closing a gas valve according to the gas pressure indication in the cavity, and extracting a sample by adopting a gas taking bottle; and testing the chromatographic peak area of CF3SO2F in the mixed gas by adopting a GC instrument, and drawing a standard curve of the peak area and the proportion. According to the invention, the proportion detection of CF3SO2F in the mixed gas can be realized.
本发明公开了一种CF3SO2F混合气体的混合比检测方法，包括：检测整个配气系统的气路气密性，并对所述气路系统进行洗气处理；根据目标混合气体各组分所占比例，设置气体相应的灌充体积；根据腔体内气压表示数关闭气体阀门，采用取气瓶抽取样品；采用GC仪器测试CF3SO2F在混合气体的色谱峰面积，绘制峰面积与比例的标准曲线。本发明能够实现CF3SO2F在混合气体的比例检测。</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN118883805A |
| source | esp@cenet |
| subjects | INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING |
| title | Mixing ratio detection method for CF3SO2F mixed gas |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-06T03%3A07%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=ZHU%20SHAN&rft.date=2024-11-01&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN118883805A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |