Indium cerium oxide target material and preparation method thereof

The invention belongs to the field of target materials, and discloses an indium cerium oxide target material preparation method, which comprises: mixing indium oxide powder, cerium oxide powder, a dispersant and water, carrying out spray granulation to obtain mixed powder A, sintering the mixed powd...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: WANG QIFENG, LUO SISHI, LI KAIJIE, GU DESHENG, ZHANG XINGYU
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!