Probe card angle adjusting base

The invention discloses a probe card angle adjusting base, and relates to the field of probe card bases, the probe card angle adjusting base comprises a base main body, the bottom end of the base main body is provided with a plurality of groups of probes, the base main body is arranged above a probe...

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1. Verfasser: YE HUIMEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a probe card angle adjusting base, and relates to the field of probe card bases, the probe card angle adjusting base comprises a base main body, the bottom end of the base main body is provided with a plurality of groups of probes, the base main body is arranged above a probe station, the probe station is internally and movably provided with a processing disc, the top end of the processing disc is provided with a wafer, and the wafer is arranged on the processing disc. An annular table is arranged at the top end of the probe table, the base body is movably connected with the annular table, and the probe extends into the probe table and is located above the wafer. When a wafer is cleaned, airflow passes through the air guide pipe and the inner ring to enter the bent pipe, when a semiconductor on the wafer is attached to the bottom end of the probe, a semiconductor metal piece in a cleaning opening in the bottom end of the air bag is blocked, the airflow cannot be discharged, and air pre