Six-degree-of-freedom micropositioner

The invention relates to the technical field of microelectronic manufacturing equipment, in particular to a six-degree-of-freedom micropositioner which is composed of an upper table top, a gravity compensation array, a vertical driving motor, a horizontal driving motor and a lower base, the gravity compensation array is composed of M * N magnetic suspension devices so as to unload the gravity of the table top and the table top load, and the gravity compensation array is used for compensating the gravity of the table top and the table top load. And small-stroke six-degree-of-freedom movement under large bearing capacity can be realized. Due to the adoption of the magnetic suspension technology, the controllability is higher, and higher stability and higher precision can be achieved through effective control. Meanwhile, the device is simple in structural form, high in integration level and low in manufacturing cost. 本发明涉及微电子制造设备技术领域，尤其涉及一种六自由度微动台，六自由度微动台由上台面、重力补偿阵列、竖直驱动电机、水平驱动电机和下底座组成，其中，重力补偿阵列由M×N个磁力悬浮器组成，以此来卸