Sample holding tool

The sample holding tool includes a ceramic plate, a heat-resistant member, and a base member. The ceramic plate, the heat-resistant member, and the base member are arranged in this order. The heat-resistant member has a lower coefficient of thermal expansion than the ceramic plate, and is not joined...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: TAKASAKI TOMOYA
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The sample holding tool includes a ceramic plate, a heat-resistant member, and a base member. The ceramic plate, the heat-resistant member, and the base member are arranged in this order. The heat-resistant member has a lower coefficient of thermal expansion than the ceramic plate, and is not joined to the ceramic plate. 试料保持工具具备陶瓷板、耐热构件以及基座构件。陶瓷板、耐热构件以及基座构件以陶瓷板、耐热构件、基座构件的顺序配置。耐热构件与陶瓷板相比热膨胀率较小,且未与陶瓷板接合。