Solar cell and manufacturing method thereof

The invention discloses a solar cell and a manufacturing method thereof, relates to the technical field of photovoltaics, and aims to enhance the diffusion barrier effect on a dopant in a first doped semiconductor layer through a compact tunneling oxide layer and reduce the depth of a diffusion doped layer formed in a corresponding region of a semiconductor substrate. The solar cell includes a semiconductor substrate, a first tunneling oxide layer, and a first doped semiconductor layer. The semiconductor substrate has a first surface and a second surface which are opposite to each other, one surface is a light-facing surface, and the other surface is a backlight surface. And the first tunneling oxide layer and the first doped semiconductor layer are arranged on at least partial region of the first surface and/or the second surface in a laminated manner. The corrosion rate of the first tunneling oxide layer in the etching solution along the thickness direction of the first tunneling oxide layer is greater than