End point detection device and method for high-precision ultraviolet short wave band

The invention provides a high-precision ultraviolet short-wave-band end point detection device and method, and the device and method are used for detecting optical signals generated in a machine chamber in the etching and thin film process. The signal collecting module and the processing module are connected through a signal line; the signal collection module comprises a probe and an optical fiber, is arranged on one side of the machine chamber and is used for acquiring an optical signal emitted in the machine chamber in an etching process and transmitting the optical signal to the processing module; the processing module comprises an optical module and a CMOS detector, and is used for processing the optical signal and outputting a light intensity curve through an upper computer. The method has the advantages that specific ultraviolet short-wave band light is preliminarily screened, light signals are accurately extracted and processed through a self-designed light path, the end point detection accuracy is imp