Detector damage online detection device and method based on dual-wavelength laser interference
The invention belongs to the technical field of optical detection of detectors, and particularly relates to an online detector damage detection device and method based on dual-wavelength laser interference. Comprising a first wavelength laser, a second wavelength laser, a first total reflective mirr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention belongs to the technical field of optical detection of detectors, and particularly relates to an online detector damage detection device and method based on dual-wavelength laser interference. Comprising a first wavelength laser, a second wavelength laser, a first total reflective mirror, a beam combiner, a second total reflective mirror, a spectroscope, a plano-convex mirror, an interference image acquisition camera and a detector to be detected. On-line detection of the detector is achieved through an interference method, cat eye echoes formed by the detector are used as detection light, and internal information of the detector is reflected more visually. And performing image processing on the dual-wavelength cat eye echo interference images before and after damage to extract fringe information, and inverting damage information. The effective detection range can be widened by using dual-wavelength interference, the problem of periodic jump of fringes is solved, the damage depth information of |
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