Coating equipment

The invention discloses coating equipment. The coating equipment comprises an evaporation cavity, a reaction cavity, a substrate driving assembly, a heating assembly and a purging assembly, the evaporation cavity is used for sublimating a precursor and is communicated with the reaction cavity; the substrate driving assembly comprises a base station, the base station is used for bearing a substrate, and at least part of the base station is located in the reaction cavity; a thermal insulation layer is arranged in the reaction cavity, a heating space for accommodating the base station is defined by the thermal insulation layer, and a purging gap exists between the thermal insulation layer and the inner wall of the reaction cavity; the purging assembly can output purging gas, and the purging assembly communicates with the purging gap, so that flowing purging gas exists in the purging gap. Through the arrangement, the utilization rate of the raw material gas can be improved. 本申请公开了一种镀膜设备，该镀膜设备包括蒸发腔、反应腔、基片驱动组件、加热组件