Laser interference micro-nano manufacturing system based on galvanometer

The invention relates to a laser interference micro-nano manufacturing system based on galvanometers, which comprises a laser and a laser beam splitting light transmission device, and is characterized in that a first galvanometer receives a first coherent light beam, and a second galvanometer receiv...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU TONG, QIAO JIAN, WANG SHENZHI, WANG GUANQUN, LIU XIAOQUN, WENG ZHANKUN, YANG JINGWEI, LI TAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a laser interference micro-nano manufacturing system based on galvanometers, which comprises a laser and a laser beam splitting light transmission device, and is characterized in that a first galvanometer receives a first coherent light beam, and a second galvanometer receives a second coherent light beam; the machining platform comprises a carrying table, an X-axis moving module and a Y-axis moving module, the carrying table is used for loading a to-be-machined part, the surface of the to-be-machined part is divided into a plurality of machining partitions arranged in an array mode, the carrying table is arranged on the X-axis moving module, the X-axis moving module is arranged on the Y-axis moving module, and the X-axis moving module is arranged on the Y-axis moving module. A first coherent light beam controlled by the first galvanometer and a second coherent light beam controlled by the second galvanometer are converged to form an interference light spot, the interference light spo