Composite electrode and preparation method thereof

The invention provides a composite electrode and a preparation method thereof. The composite electrode comprises a substrate, a metal layer, an insulating layer, a grid electrode and a three-dimensional nano-porous micro-column array electrode, latticed grooves are formed in the surface of the subst...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GENG QINGHUA, CHEN SHUHAN, LIN ZHANWEN, LEE KANG-KYUNG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention provides a composite electrode and a preparation method thereof. The composite electrode comprises a substrate, a metal layer, an insulating layer, a grid electrode and a three-dimensional nano-porous micro-column array electrode, latticed grooves are formed in the surface of the substrate, so that a plurality of convex parts are formed on the surface of the substrate; the metal layer and the insulating layer are sequentially arranged on the concave-convex surface of the substrate; a grid electrode is arranged on one side, deviating from the metal layer, of the part, located in the grid-shaped groove, of the insulating layer, and meshes of the grid electrode are formed in the part, located in the protruding part, of the insulating layer; zero, one or more than one nano-porous micro-column electrode is arranged in the meshes; the nano-porous micro-column electrodes have nano-porous structures, and each nano-porous micro-column electrode penetrates through the insulating layer and extends to one s