Abbe error measurement method of leveling staff

The invention relates to the field of measurement, in particular to a leveling staff Abbe error measurement method which comprises the following steps: S1, mounting an Abbe error measurement device, fixing a to-be-measured leveling staff, and opening a light source table; s2, debugging a light path...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI ZHI, WEI YUE, YU XING, XIE CHUNJIANG, SHAN JING, DING CHEN, WANG ZHUYANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the field of measurement, in particular to a leveling staff Abbe error measurement method which comprises the following steps: S1, mounting an Abbe error measurement device, fixing a to-be-measured leveling staff, and opening a light source table; s2, debugging a light path to enable emergent light of the second cubic beam splitter to stay at the central point of the four-quadrant detector and enable the laser interferometer to be in a zero-position to-be-measured state; s3, moving the workbench along the guide rail, positioning the graduation scales of different measuring points of the leveling staff through a lens, synchronously reading the positions of light spots in the four-quadrant detector, and calculating the offset angle theta between the measuring axis of the current measuring point and the reference axis; s4, calculating an indication error delta l of the leveling staff according to the offset angles theta of the different measurement points; and S5, correcting the leveling