Impedance matcher, impedance matching method and plasma processing system

An impedance matcher, an impedance matching method and a plasma processing system, the impedance matcher comprising: a first detection unit suitable for acquiring a first voltage amplitude and a first current amplitude of an input end of the impedance matcher and a phase difference between a first d...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	XUE JINGLONG, XIAO ZHIQIANG, LI NAN, ZHANG ZHIYING, NAN YANRONG, ZHANG YANG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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