Integrated electronic device with improved conductive contact structure and related manufacturing process

Integrated electronic device with improved conductive contact structure and related manufacturing process

The invention relates to an integrated electronic device with an improved conductive contact structure and a related manufacturing process. The integrated electronic device includes: a silicon semiconductor body delimited by a front surface and including at least a first semiconductive region of a f...

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Hauptverfasser: SIMONE DARIO MARIANI, FAGGIANI, DOMENICO, GREGOIRE, MICHEL, CABARET THIERRY
Format: Patent
Sprache:chi ; eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator SIMONE DARIO MARIANI
FAGGIANI, DOMENICO
GREGOIRE, MICHEL
CABARET THIERRY
description The invention relates to an integrated electronic device with an improved conductive contact structure and a related manufacturing process. The integrated electronic device includes: a silicon semiconductor body delimited by a front surface and including at least a first semiconductive region of a first conductivity type and a second semiconductive region of a second conductivity type, the first semiconductive region extending from the front surface into the semiconductor body, the second semiconductive region extending below the first semiconductive region; a dielectric coverage area; a trench extending through the dielectric cover region and through a front portion of the semiconductor body in such a way that a portion of the first semiconductive region laterally faces the trench, the trench extending partially inside the second semiconductive region; a conductive contact structure extending into the trench and comprising: a coated region of titanium silicide covering a bottom of the trench, in contact with
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Integrated electronic device with improved conductive contact structure and related manufacturing process
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