Substrate transfer robot

Substrate transfer robot

In a substrate transfer robot (100), a wrist joint (JT3) has a first bearing (42) that rotatably supports a first rotation shaft (41) that rotates a first substrate holding robot hand (21), and a second bearing (44) that rotatably supports a second rotation shaft (43) that rotates a second substrate...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHIBATA TAKESHI, ONO RYOTA, MATSUOKA JUNICHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:In a substrate transfer robot (100), a wrist joint (JT3) has a first bearing (42) that rotatably supports a first rotation shaft (41) that rotates a first substrate holding robot hand (21), and a second bearing (44) that rotatably supports a second rotation shaft (43) that rotates a second substrate holding robot hand (22). The first bearing and the second bearing are ball bearings. 在基板搬运机器人(100)中，腕关节(JT3)具有将使第1基板保持机械手(21)转动的第1转动轴(41)支承为能够转动的第1轴承(42)、和将使第2基板保持机械手(22)转动的第2转动轴(43)支承为能够转动的第2轴承(44)。第1轴承和第2轴承是球轴承。