Electrostatic chuck and manufacturing method

The invention discloses an electrostatic chuck and a manufacturing method, the electrostatic chuck comprises a bearing disc and a base, the bearing disc comprises a first ceramic substrate, a second ceramic substrate and a uniform-temperature heat dissipation part, the first ceramic substrate is pro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHAO PENG, JIANG JIAWANG, HUANG QINGSONG, HUANG MINGHAI, BU SUQIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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