Electrostatic chuck and manufacturing method

The invention discloses an electrostatic chuck and a manufacturing method, the electrostatic chuck comprises a bearing disc and a base, the bearing disc comprises a first ceramic substrate, a second ceramic substrate and a uniform-temperature heat dissipation part, the first ceramic substrate is provided with a bearing surface for bearing a wafer, and an electrostatic electrode is embedded in the first ceramic substrate; the second ceramic substrate is in sealed connection with one side, far away from the bearing surface, of the first ceramic substrate, and a heating element is embedded in the second ceramic substrate; the uniform-temperature heat dissipation part comprises a cavity formed by hermetically connecting a first ceramic matrix and a second ceramic matrix, a porous capillary structure arranged on the inner wall of the cavity and a heat exchange working medium filled in the cavity; the base is connected with the side, away from the first ceramic base body, of the second ceramic base body, and a micr