Method for enhancing vertical magnetic anisotropy of CoFe-based magnetic multilayer film

The invention discloses a method for enhancing vertical magnetic anisotropy of a CoFe-based magnetic multilayer film. The method comprises the following specific steps: step 1, preparing an MgO layer: directly depositing on a substrate by a radio frequency magnetron sputtering method; step 2, preparing a CoFe-based magnetic layer: depositing the CoFe-based magnetic layer on the MgO layer by a radio frequency magnetron sputtering method; step 3, preparing a Mo isolation layer: depositing the Mo isolation layer on the CoFe-based magnetic layer by a direct current magnetron sputtering method; 4, a heavy metal layer is prepared, wherein the heavy metal layer is deposited on the Mo isolation layer through a direct current magnetron sputtering method; and 5, annealing: after the deposition of the heavy metal layer is finished, annealing the sample. The method is simple in preparation process and low in preparation difficulty, and the perpendicular magnetic anisotropy of the CoFe-based magnetic multilayer film is ef