Inspection apparatus, inspection method, and inspection system

The invention provides inspection equipment, an inspection method thereof and an inspection system. The inspection apparatus includes a transmission imaging device configured to construct a transmission image of an inspected object; and a diffraction detection device configured to detect a characteristic of at least a portion of the object to be inspected. The transmission imaging device defines an inspection channel. The diffraction detection device can move to a specific position to detect radiation diffracted by at least a part of the detected object. 本发明提供了一种检查设备及其检查方法、检查系统。检查设备包括透射成像装置，配置成构建被检查对象的透射图像；和衍射检测装置，配置成检测被检查对象的至少一部分的特性。透射成像装置限定检查通道。衍射检测装置能够移动至特定位置检测被检查对象的至少一部分衍射的辐射。