XPS sample freezing and transferring device and method

The invention relates to an XPS sample freezing and transferring device and method.The XPS sample freezing and transferring device comprises a sample preparation chamber and a rapid freezing vacuum chamber, one end of the rapid freezing vacuum chamber is connected with the sample preparation chamber...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	YUAN ZHEN, ZHAO ZHIJUAN, ZHANG XIAOYU, QU BAOLONG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING COLD ROOMS COMBINED HEATING AND REFRIGERATION SYSTEMS COOLING OR FREEZING APPARATUS NOT COVERED BY ANY OTHERSUBCLASS HEAT PUMP SYSTEMS HEATING ICE-BOXES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIGHTING LIQUEFACTION SOLIDIFICATION OF GASES MANUFACTURE OR STORAGE OF ICE MEASURING MECHANICAL ENGINEERING PHYSICS REFRIGERATION OR COOLING REFRIGERATORS TESTING WEAPONS
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Beschreibung
Zusammenfassung:	The invention relates to an XPS sample freezing and transferring device and method.The XPS sample freezing and transferring device comprises a sample preparation chamber and a rapid freezing vacuum chamber, one end of the rapid freezing vacuum chamber is connected with the sample preparation chamber, and the other end of the rapid freezing vacuum chamber is connected with an XPS instrument preparation chamber; a temperature-controllable low-temperature freezing module and a positive-pressure sealing module for loading a sample are arranged in the rapid freezing vacuum chamber, and the low-temperature freezing module is connected with the positive-pressure sealing module in a nested manner; the conveying mechanism penetrates through the sample preparation chamber and is detachably connected with the positive pressure sealing module, and the conveying mechanism can drive the positive pressure sealing module to move in the rapid freezing vacuum chamber and can transfer the positive pressure sealing module to the