Wireless wafer temperature measuring device and temperature measuring method using same

The invention discloses a wireless wafer temperature measuring device and a temperature measuring method using the same. The wafer temperature measuring device comprises a single temperature measuring wafer; a temperature acquisition module; wherein the temperature acquisition module comprises a temperature probe which is fixed on the temperature measurement surface of the temperature measurement wafer; the data processing unit is fixed on the temperature measuring wafer and is coupled with the temperature probe through a data transmission line; and the protective cover plate is fixed on the temperature measuring wafer, covers the temperature probe, the data processing unit and the data transmission line, and exposes other positions on the temperature measuring wafer. According to the embodiment of the invention, the protective cover plate can protect the temperature acquisition module, reduces the adverse effect of the process atmosphere on the temperature acquisition module when the process conditions are e