Double electro-optical crystal modulation self-mixing vibration measurement system and method
The invention discloses a double-electro-optical crystal modulation self-mixing vibration measurement system and method. The system comprises a laser, a first spectroscope, a first electro-optical crystal, a second electro-optical crystal and a photoelectric detector. The first spectroscope splits l...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a double-electro-optical crystal modulation self-mixing vibration measurement system and method. The system comprises a laser, a first spectroscope, a first electro-optical crystal, a second electro-optical crystal and a photoelectric detector. The first spectroscope splits laser of the laser into measuring light and reference light; the first electro-optical crystal and the surface of the measured target are located on a light path of the measuring light, the frequency of the measuring light is modulated to all orders of harmonic waves of # imgabs0 #, then the measuring light is emitted to the surface of the measured target, and the measuring light returns to the laser resonant cavity along the same path; the second electro-optical crystal and the static reference surface are located on a light path of the reference light, the frequency of the reference light is modulated to each order harmonic wave of # imgabs1 #, then the reference light is irradiated on the static reference surface |
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