Chemical liquid dispensing apparatus

There is provided a chemical liquid dispensing apparatus including: a head assembly including a channel unit through which a chemical liquid flows, and a plurality of nozzles through which the chemical liquid flows from the channel unit, and the plurality of nozzles distribute the chemical liquid on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YU ZHANGJIANGWEI, JANG SUKWON, LI HAOSHANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:There is provided a chemical liquid dispensing apparatus including: a head assembly including a channel unit through which a chemical liquid flows, and a plurality of nozzles through which the chemical liquid flows from the channel unit, and the plurality of nozzles distribute the chemical liquid onto a substrate; and a duct connected to the head assembly and through which the chemical liquid travels, in which the channel unit includes a first flow path having a branch structure and a second flow path connected to the first flow path and supplying the chemical liquid to the plurality of nozzles. 提供了一种化学液体分配设备,所述化学液体分配设备包括:头组件,所述头组件包括通道单元和多个喷嘴,化学液体流动通过所述通道单元,所述化学液体从所述通道单元流动通过所述多个喷嘴,并且所述多个喷嘴将所述化学液体分配到衬底上;和管道,所述管道连接到所述头组件,并且所述化学液体行进通过所述管道,其中,所述通道单元包括第一流路和第二流路,所述第一流路具有分支结构,所述第二流路连接到所述第一流路并且向所述多个喷嘴供应所述化学液体。